KEMET Metal-Case High-Performance Actuators
KEMET Metal-Case High-Performance Actuators feature a metal-sealed design for enhanced protection against ambient humidity, delivering higher performance and an extended operational lifetime. These multilayer piezoelectric actuators include the AHB, ASB, and ASL series. The devices are based on a proprietary element-structure design and piezoelectric ceramic materials with high electrostrictive coefficients. KEMET Metal-Case High-Performance Actuators are smaller than conventional piezoelectric actuators, but produce higher displacements and forces at a low voltage. These actuators feature ±20% capacitance tolerance, a maximum driving voltage of 150VDC, and an insulation resistance of 1MΩ or higher. Suitable applications include controllers, inspection and lithography systems, as well as deposition and etching processes.
Features
- Metal-sealed design provides better protection against ambient humidity
- Based on proprietary element structure design and piezoelectric ceramic materials with high electrostrictive factors
- Offers higher performance
- Extended operational lifetime
- Smaller size than conventional piezoelectric actuators, but produces higher displacements and forces at low voltage
- Lineup includes AHB, ASB, and ASL series
Applications
- Mass flow controllers (MFC)
- Depositions and etching
- Inspection systems
- Lithography systems
Specifications
- 150VDC maximum driving voltage
- ±20% capacitance tolerance
- 1MΩ or higher insulation resistance
- +85˚C or +150˚C rated temperature
Overview
Metal Case
Application Guide
Related Actuators
KEMET Multilayer Piezoelectric Actuators
150VDC maximum driving voltage, ±20% capacitance tolerance & insulation resistance of 1MΩ or higher.