TE Connectivity / Measurement Specialties 85UHP Pressure Sensors
TE Connectivity's (TE) / Measurement Specialties 85UHP Pressure Sensors feature a MEMS piezo-resistive chip incorporated into a 316L stainless steel or alloy C276 module, filled with silicone oil, which transmits pressure from a thin corrugated diaphragm on the front face. The media-compatible, weldable compact profile is designed and manufactured for OEMs for a semiconductor application process duration exceeding the TE standard 85 ISO capsule. The 85UHP pressure sensors offer wetted-material options and surface roughness optimized for ultra-high purity and ultra-high vacuum applications. The devices use TE's advanced MEMS capabilities to deliver precision and stability.
Features
- Absolute pressure measurement
- Solid-state reliability
- C276 or 316L SS wetted surface material (optional)
- Compensated or uncompensated (optional)
- F105-compliant wetted surfaces (alloy C276 variants)
Applications
- Gas cabinets
- Mass flow controller
- High-purity gas delivery system
- Pressure and flow control in
- Semiconductor process
Specifications
- High vacuum stability at 10-3Pa
- Up to ±0.1% pressure non-linearity
- 13mm diaphragm diameter
- 0.1% span/year long-term stability
- -40°C to +125°C operating temperature range
Videos
DIMENSIONS - Uncompensated
DIMENSIONS- Constant Current Compensated
DIMENSIONS - Constant Voltage Compensated
發佈日期: 2025-09-19
| 更新日期: 2026-06-02